PRODUCT
Atmosheric Wafer Transfer Robot has various models with combinations main body, arm&hand, common running axis. It is realized high-speed and flexible customizing with modularity.
Wafer Size
~300mmOperating Range
A or B-Axis 510mm, Θ-Axis 330deg, Z-Axis 300mm, R Axis 183degSpeed
A or B-Axis 1700mm/s, Θ-Axis 235~470deg/s, Z-Axis 150~500mm/s, R-Axis 300deg/sCleanliness
Class 1(0.1㎛/cf)Payload
500g~3kg(Including the hand)